Behavior of platinum/tantalum as interdigital transducers for SAW devices in high-temperature environments
In this paper, we report on the use of tantalum as adhesion layer for platinum electrodes used in high-temperature SAW devices based on langasite substrates (LGS). Tantalum exhibits a great adhesive strength and a very low mobility through the Pt film, ensuring a device lifetime at 900°C of about on...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 3 vom: 22. März, Seite 603-10
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| 1. Verfasser: |
Aubert, Thierry
(VerfasserIn) |
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| Weitere Verfasser: |
Elmazria, Omar,
Assouar, Badreddine,
Bouvot, Laurent,
Hehn, Michel,
Weber, Sylvain,
Oudich, Mourad,
Genève, Damien |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2011
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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