Electromagnetic micropores : fabrication and operation

We describe the fabrication and characterization of electromagnetic micropores. These devices consist of a micropore encompassed by a microelectromagnetic trap. Fabrication of the device involves multiple photolithographic steps, combined with deep reactive ion etching and subsequent insulation step...

Description complète

Détails bibliographiques

Publié dans:	Langmuir : the ACS journal of surfaces and colloids. - 1985. - 26(2010), 24 vom: 21. Dez., Seite 19239-44
Auteur principal:	Basore, Joseph R (Auteur)
Autres auteurs:	Lavrik, Nickolay V, Baker, Lane A
Format:	Article en ligne
Langue:	English
Publié:	2010
Accès à la collection:	Langmuir : the ACS journal of surfaces and colloids
Sujets:	Journal Article