Effects of surface properties of different substrates on fine structure of plasma-polymerized SiOCH films prepared from hexamethyldisiloxane (HMDSO)
In this study, Doppler broadening energy spectroscopy (DBES) combined with slow positron beam was used to discuss the effect of substrate types on the fine structure of a plasma-polymerized SiOCH layer as a function of depth. From the SEM pictures, the SiOCH films formed on different substrates show...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 26(2010), 22 vom: 16. Nov., Seite 17470-6
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| 1. Verfasser: |
Lo, Chia-Hao
(VerfasserIn) |
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| Weitere Verfasser: |
Liao, Kuo-Sung,
De Guzman, Manuel,
Rouessac, Vincent,
Wei, Ta-Chin,
Lee, Kueir-Rarn,
Lai, Juin-Yih |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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