Fabrication of complex patterns with a wide range of feature sizes from a single line prepattern by successive application of capillary force lithography

The variously shaped gold patterns can be generated from the polydimethylsiloxane (PDMS) mold using line patterns by the capillary force lithography (CFL) process, which is a kind of nanoimprint method following the two-cycle method. After fabrication of micro- or nanosized line patterns at the firs...

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Veröffentlicht in:	Langmuir : the ACS journal of surfaces and colloids. - 1992. - 26(2010), 17 vom: 07. Sept., Seite 14359-63
1. Verfasser:	Lee, Su-Kyong (VerfasserIn)
Weitere Verfasser:	Jung, Jin-Mi, Lee, Ji-Sun, Jung, Hee-Tae
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2010
Zugriff auf das übergeordnete Werk:	Langmuir : the ACS journal of surfaces and colloids
Schlagworte:	Journal Article