Direct patterning of covalent organic monolayers on silicon using nanoimprint lithography

Two fabrication schemes are reported for the direct patterning of organic monolayers on oxide-free silicon, combining top-down nanoimprint lithography and bottom-up monolayer formation. The first approach was designed to form monolayer patterns on the imprinted areas, while the second approach was d...

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Publié dans:Langmuir : the ACS journal of surfaces and colloids. - 1985. - 26(2010), 17 vom: 07. Sept., Seite 14210-5
Auteur principal: Voorthuijzen, W Pim (Auteur)
Autres auteurs: Yilmaz, M Deniz, Gomez-Casado, Alberto, Jonkheijm, Pascal, van der Wiel, Wilfred G, Huskens, Jurriaan
Format: Article en ligne
Langue:English
Publié: 2010
Accès à la collection:Langmuir : the ACS journal of surfaces and colloids
Sujets:Journal Article