Fabrication and Characterization of Individually Controlled Multi-Pixel Carbon Nanotube Cathode Array Chip for Micro-RT Application for Cancer Research
We report here the development of a new carbon nanotube (CNT) field emission multi-pixel cathode array chip, a vital component for the multi-pixel beam x-ray micro-radiotherapy (micro-RT) system under development in our group for cancer research. The CNT field emission cathode array chip has up to 2...
| Veröffentlicht in: | Materials Research Society symposia proceedings. Materials Research Society. - 1998. - 1065E(2007) vom: 01. Okt., Seite 1065QQ0408 |
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| Weitere Verfasser: | , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | Materials Research Society symposia proceedings. Materials Research Society |
| Schlagworte: | Journal Article |
| Zusammenfassung: | We report here the development of a new carbon nanotube (CNT) field emission multi-pixel cathode array chip, a vital component for the multi-pixel beam x-ray micro-radiotherapy (micro-RT) system under development in our group for cancer research. The CNT field emission cathode array chip has up to 25 (5 × 5) individually addressable cathode pixels, each 1 mm in diameter and with center-to-center distance of 2 mm. The fabrication is a two-step process: first a Cr/Cu electrical contact was fabricated on Si substrates with a 5 μm SiO(2) dielectric layer using photolithography; and second the CNTs were selectively deposited on 1 mm-diameter predefined Cr/Cu contact dots by using a combined photolithography/electrophoresis deposition technique. The electron pixel beams produced from the multi-pixel array chips are uniform and individually controllable. Each pixel beam is expected to generate a dose rate in the order of 100 cGy/min based on our Monte Carlo simulations |
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| Beschreibung: | Date Revised 20.10.2021 published: Print Citation Status PubMed-not-MEDLINE |
| ISSN: | 0272-9172 |