Rotary-linear piezoelectric microactuator with a cubic stator of side length 3.5 mm
We report a miniature rotary-linear piezoelectric actuator with a single cubic stator of side length 3.5 mm which can generate rotary motion around the center axis and linear motion in the axial direction. The stator is fabricated as a single metallic cube of side length 3.5 mm with a 2.5-mm diamete...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 8 vom: 01. Aug., Seite 1825-30 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
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2010
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't |
| Online verfügbar |
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