Modal control of mechanically coupled NEMS arrays for tunable RF filters

A novel tuning strategy of nanoelectromechanical systems (NEMS)-based filters is proposed based on the modal control of mechanically coupled NEMS arrays. This is done by adjusting separately addressed distributed actuation and detection configurations proportionally to desired modal vectors. This co...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 6 vom: 02. Juni, Seite 1285-95
1. Verfasser: Kharrat, Chady (VerfasserIn)
Weitere Verfasser: Colinet, Eric, Duraffourg, Laurent, Hentz, Sebastien, Andreucci, Philippe, Voda, Alina
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2010
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't