Experimental study of thermodynamic surface characteristics and pH sensitivity of silicon dioxide and silicon nitride
In this report, we have introduced a revision of the chemical treatment influence on the surface thermodynamic properties of silicon dioxide (SiO(2)) and silicon nitride (Si(3)N(4)) solid thin layers. Some characterization techniques might be used to quantify the thermodynamic properties of solid su...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 26(2010), 10 vom: 18. Mai, Seite 7165-73 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article Silicon Compounds Silicon Dioxide 7631-86-9 silicon nitride QHB8T06IDK |
| Online verfügbar |
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