Theoretical analysis of SAW propagation characteristics in (100) oriented AlN/diamond structure

In this study, the finite element method is employed to calculate SAW characteristics in (100) AlN/diamond based structures with different electrical interfaces; i.e., IDT/ AlN/diamond, AlN/IDT/diamond, IDT/AlN/thin metal film/ diamond, and thin metal film/AlN/IDT/diamond. The effects of Cu and Al e...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 1 vom: 19. Jan., Seite 46-51
1. Verfasser:	Ro, Ruyen (VerfasserIn)
Weitere Verfasser:	Chiang, Yuan-Feng, Sung, Chia-Chi, Lee, Ruyue, Wu, Sean
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2010
Zugriff auf das übergeordnete Werk:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:	Journal Article Research Support, Non-U.S. Gov't Aluminum Compounds Diamond 7782-40-3 aluminum nitride 7K47D7P3M0