Galvanic deposition of Pt clusters on silicon : effect of HF concentration and application as catalyst for silicon nanowire growth
We report on the galvanic deposition of Pt on Si from solutions containing PtCl(2) and different concentrations of HF. The results show that for low [HF]/[Pt] ratios (<or=26), only a thin layer of PtSi is formed. The deposition rate of Pt increases with [HF] in the plating solution, up to [HF]/[P...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 26(2010), 1 vom: 05. Jan., Seite 432-7
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| 1. Verfasser: |
Cerruti, Marta
(VerfasserIn) |
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| Weitere Verfasser: |
Doerk, Gregory,
Hernandez, Gail,
Carraro, Carlo,
Maboudian, Roya |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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