Comparison of chemical lithography using alkanethiolate self-assembled monolayers on GaAs (001) and Au
We have investigated the efficiency of bifunctional pattern formation in alkanethiolate self-assembled monolayers (SAMs) adsorbed on GaAs (001) and Au, using time-of-flight secondary ion mass spectrometry. Two patterning techniques were employed: electron beam lithography and UV photopatterning. Pre...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 26(2010), 6 vom: 16. März, Seite 4523-8
|
1. Verfasser: |
Zhou, Chuanzhen
(VerfasserIn) |
Weitere Verfasser: |
Trionfi, Aaron,
Jones, Jason C,
Hsu, Julia W P,
Walker, Amy V |
Format: | Online-Aufsatz
|
Sprache: | English |
Veröffentlicht: |
2010
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
|
Schlagworte: | Comparative Study
Journal Article
Research Support, U.S. Gov't, Non-P.H.S.
Alkanes
Sulfhydryl Compounds
Gold
7440-57-5 |