Comparison of chemical lithography using alkanethiolate self-assembled monolayers on GaAs (001) and Au

We have investigated the efficiency of bifunctional pattern formation in alkanethiolate self-assembled monolayers (SAMs) adsorbed on GaAs (001) and Au, using time-of-flight secondary ion mass spectrometry. Two patterning techniques were employed: electron beam lithography and UV photopatterning. Pre...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 26(2010), 6 vom: 16. März, Seite 4523-8
1. Verfasser: Zhou, Chuanzhen (VerfasserIn)
Weitere Verfasser: Trionfi, Aaron, Jones, Jason C, Hsu, Julia W P, Walker, Amy V
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2010
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Comparative Study Journal Article Research Support, U.S. Gov't, Non-P.H.S. Alkanes Sulfhydryl Compounds Gold 7440-57-5