Very high frequency (beyond 100 MHz) PZT kerfless linear arrays

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-elemen...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 10 vom: 01. Okt., Seite 2304-10
1. Verfasser: Wu, Da-Wei (VerfasserIn)
Weitere Verfasser: Zhou, Qifa, Geng, Xuecang, Liu, Chang-Geng, Djuth, Frank, Shung, K Kirk
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2009
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, N.I.H., Extramural Chromium 0R0008Q3JB lead titanate zirconate 12626-81-2 Lead 2P299V784P Gold 7440-57-5 mehr... Zirconium C6V6S92N3C Titanium D1JT611TNE
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520 |a This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss) 
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650 7 |a C6V6S92N3C  |2 NLM 
650 7 |a Titanium  |2 NLM 
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700 1 |a Zhou, Qifa  |e verfasserin  |4 aut 
700 1 |a Geng, Xuecang  |e verfasserin  |4 aut 
700 1 |a Liu, Chang-Geng  |e verfasserin  |4 aut 
700 1 |a Djuth, Frank  |e verfasserin  |4 aut 
700 1 |a Shung, K Kirk  |e verfasserin  |4 aut 
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