Molecular dynamics simulations of nanoimprinting lithography

We have performed coarse-grained molecular dynamics simulations of molding and replication of nanometer-size objects. Nanoimprinting of hemispherical particles was modeled as a three-step process: (1) a mold was created by pressing a hard hemispherical particle (master template) into a polymeric fil...

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Publié dans:	Langmuir : the ACS journal of surfaces and colloids. - 1985. - 25(2009), 22 vom: 17. Nov., Seite 13244-9
Auteur principal:	Carrillo, Jan-Michael Y (Auteur)
Autres auteurs:	Dobrynin, Andrey V
Format:	Article en ligne
Langue:	English
Publié:	2009
Accès à la collection:	Langmuir : the ACS journal of surfaces and colloids
Sujets:	Journal Article