Molecular dynamics simulations of nanoimprinting lithography
We have performed coarse-grained molecular dynamics simulations of molding and replication of nanometer-size objects. Nanoimprinting of hemispherical particles was modeled as a three-step process: (1) a mold was created by pressing a hard hemispherical particle (master template) into a polymeric fil...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 25(2009), 22 vom: 17. Nov., Seite 13244-9 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
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2009
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Online verfügbar |
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