Directed self-assembly of cylinder-forming block copolymers : prepatterning effect on pattern quality and density multiplication factor
We demonstrate a method, employing prepatterns based on hydrogen silsesquioxane (HSQ) resist, for fabricating highly dense dot arrays of perpendicular block copolymer (BCP) cylinders with improved quality or increased density multiplication factors compared to conventional SiO(x)-based chemical prep...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1991. - 25(2009), 21 vom: 03. Nov., Seite 12408-13 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2009
|
| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Online verfügbar |
Volltext |