Replica mold for nanoimprint lithography from a novel hybrid resin
The use of durable replica molds with high feature resolution has been proposed as an inexpensive and convenient route for manufacturing nanostructured materials. A simple and fast duplication method, involving the use of a master mold to create durable polymer replicas as imprinting molds, has been...
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Détails bibliographiques
Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 25(2009), 19 vom: 06. Okt., Seite 11768-76
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Auteur principal: |
Lee, Bong Kuk
(Auteur) |
Autres auteurs: |
Hong, Lan-Young,
Lee, Hea Yeon,
Kim, Dong-Pyo,
Kawai, Tomoji |
Format: | Article en ligne
|
Langue: | English |
Publié: |
2009
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Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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Sujets: | Journal Article |