Replica mold for nanoimprint lithography from a novel hybrid resin
The use of durable replica molds with high feature resolution has been proposed as an inexpensive and convenient route for manufacturing nanostructured materials. A simple and fast duplication method, involving the use of a master mold to create durable polymer replicas as imprinting molds, has been...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 25(2009), 19 vom: 06. Okt., Seite 11768-76
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1. Verfasser: |
Lee, Bong Kuk
(VerfasserIn) |
Weitere Verfasser: |
Hong, Lan-Young,
Lee, Hea Yeon,
Kim, Dong-Pyo,
Kawai, Tomoji |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2009
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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Schlagworte: | Journal Article |