Replica mold for nanoimprint lithography from a novel hybrid resin

The use of durable replica molds with high feature resolution has been proposed as an inexpensive and convenient route for manufacturing nanostructured materials. A simple and fast duplication method, involving the use of a master mold to create durable polymer replicas as imprinting molds, has been...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 25(2009), 19 vom: 06. Okt., Seite 11768-76
1. Verfasser: Lee, Bong Kuk (VerfasserIn)
Weitere Verfasser: Hong, Lan-Young, Lee, Hea Yeon, Kim, Dong-Pyo, Kawai, Tomoji
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2009
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article