Spurious resonance suppression in gigahertz-range ZnO thin-film bulk acoustic wave resonators by the boundary frame method : modeling and experiment
Zinc-oxide-based thin-film bulk acoustic wave (BAW) resonators operating at 932 MHz are investigated with respect to variation of dimensions of a boundary frame spurious mode suppression structure. A plate wave dispersion-based semi-2-D model and a 2-D finite element method are used to predict the e...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 8 vom: 01. Aug., Seite 1731-44 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
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2009
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't |
| Online verfügbar |
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