Self-separated hydrothermal lead zirconate titanate thick films for high frequency transducer applications
Using a simple rapid heating process, Pb(Zr(0.52)Ti(0.48))O(3) (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing,...
| Publié dans: | Applied physics letters. - 1998. - 94(2009), 10 vom: 09. März, Seite 102901 |
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| Auteur principal: | |
| Autres auteurs: | , , , , |
| Format: | Article |
| Langue: | English |
| Publié: |
2009
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| Accès à la collection: | Applied physics letters |
| Sujets: | Journal Article |
| Résumé: | Using a simple rapid heating process, Pb(Zr(0.52)Ti(0.48))O(3) (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing, the PZT thick films were shown to possess good electric properties. At 1 kHz, the dielectric constant and the loss were 593 and 0.05, respectively. The remnant polarization was 30.0 muCcm(2) at room temperature. A high frequency single element ultrasound transducer fabricated with these films showed a bandwidth at -6 dB of 73% at a center frequency of 67 MHz |
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| Description: | Date Revised 20.10.2021 published: Print Citation Status PubMed-not-MEDLINE |
| ISSN: | 0003-6951 |