Self-separated hydrothermal lead zirconate titanate thick films for high frequency transducer applications

Using a simple rapid heating process, Pb(Zr(0.52)Ti(0.48))O(3) (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing,...

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Bibliographische Detailangaben
Veröffentlicht in:	Applied physics letters. - 1998. - 94(2009), 10 vom: 09. März, Seite 102901
1. Verfasser:	Zhu, B P (VerfasserIn)
Weitere Verfasser:	Zhou, Q F, Shi, J, Shung, K K, Irisawa, S, Takeuchi, S
Format:	Aufsatz
Sprache:	English
Veröffentlicht:	2009
Zugriff auf das übergeordnete Werk:	Applied physics letters
Schlagworte:	Journal Article

Beschreibung
Zusammenfassung:	Using a simple rapid heating process, Pb(Zr(0.52)Ti(0.48))O(3) (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing, the PZT thick films were shown to possess good electric properties. At 1 kHz, the dielectric constant and the loss were 593 and 0.05, respectively. The remnant polarization was 30.0 muCcm(2) at room temperature. A high frequency single element ultrasound transducer fabricated with these films showed a bandwidth at -6 dB of 73% at a center frequency of 67 MHz
Beschreibung:	Date Revised 20.10.2021 published: Print Citation Status PubMed-not-MEDLINE
ISSN:	0003-6951