50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays
In this study, we examine the use of capacitive micromachined ultrasonic transducers (CMUTs) with vacuum- sealed cavities for transmitting directional sound with parametric arrays. We used finite element modeling to design CMUTs with 40-microm- and 60-microm-thick membranes to have resonance frequen...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 1 vom: 01. Jan., Seite 193-203
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| 1. Verfasser: |
Wygant, Ira O
(VerfasserIn) |
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| Weitere Verfasser: |
Kupnik, Mario,
Windsor, Jeffry C,
Wright, Wayne M,
Wochner, Mark S,
Yaralioglu, Goksen G,
Hamilton, Mark F,
Khuri-Yakub, Butrus T |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2009
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
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