Modified mason model for bulk acoustic wave resonators
Accurate modeling of a bulk acoustic wave resonator frequency response is limited by the inability of the current 1-D models to simulate certain parasitic modes excited in realistic 3-D structures. A simple technique is proposed to simulate such parasitic modes by employing the 1-D Mason Model of a...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 9 vom: 15. Sept., Seite 2025-9 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2008
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Evaluation Study Journal Article |
| Zusammenfassung: | Accurate modeling of a bulk acoustic wave resonator frequency response is limited by the inability of the current 1-D models to simulate certain parasitic modes excited in realistic 3-D structures. A simple technique is proposed to simulate such parasitic modes by employing the 1-D Mason Model of a resonator and a coupling term between the fundamental mode and those parasitic modes. This Modified Mason Model allows accurate simulation of resonators with arbitrary impedance and arbitrary resonating frequency. Finally, the model's prediction is compared with the on-wafer measurement of a ladder-type filter composed of several resonators |
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| Beschreibung: | Date Completed 30.01.2009 Date Revised 10.12.2019 published: Print Citation Status MEDLINE |
| ISSN: | 1525-8955 |
| DOI: | 10.1109/TUFFC.893 |