Evaluation of the improved three-dimensional resolution of a synchrotron radiation computed tomograph using a micro-fabricated test pattern
A micro test pattern prepared by focused ion beam milling was used to evaluate the three-dimensional resolution of a microtomograph at the BL20B2 beamline of SPring-8. The resolutions along the direction within the tomographic slice plane and perpendicular to it were determined from the modulation t...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 15(2008), Pt 6 vom: 25. Nov., Seite 648-54 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2008
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Evaluation Study Journal Article |
| Online verfügbar |
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