Characterization of sol-gel Pb(Zr0.53Ti0.47O3) in thin film bulk acoustic resonators
The behavior of {f111g}-textured Pb(Zr(0.53Ti0.47O3) (PZT) deposited by the sol-gel technique in thin film bulk acoustic resonators (TFBAR's) was investigated at a resonance frequency of about 1 GHz. The resonators were fabricated on Si wafers using deep silicon etching to create a membrane str...
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 6 vom: 10., Seite 1373-9 |
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| Format: | Article en ligne |
| Langue: | English |
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2008
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Sujets: | Journal Article Research Support, Non-U.S. Gov't Gels lead titanate zirconate 12626-81-2 Lead 2P299V784P Zirconium C6V6S92N3C Titanium |
| Accès en ligne |
Volltext |