Modeling of bulk acoustic wave devices built on piezoelectric stack structures : impedance matrix analysis and network representation

The fundamental electro-acoustic properties of a solid layer are deduced in terms of its impedance matrix (Z) and represented by a network for modeling the bulk acoustic wave devices built on piezoelectric stacked structures. A piezoelectric layer is described by a three-port equivalent network, a n...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 3 vom: 14. März, Seite 704-16
1. Verfasser: Zhang, Victor Y (VerfasserIn)
Weitere Verfasser: Dubus, Bertrand, Lefebvre, Jean Etienne, Gryba, Tadeusz
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2008
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article
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520 |a The fundamental electro-acoustic properties of a solid layer are deduced in terms of its impedance matrix (Z) and represented by a network for modeling the bulk acoustic wave devices built on piezoelectric stacked structures. A piezoelectric layer is described by a three-port equivalent network, a nonpiezoelectric layer, and a short- or open-circuit piezoelectric layer by a two-port one. Electrical input impedance of the resonator is derived in terms of the Z-matrix of both the piezoelectric layer and an external load, the unique expression applies whether the resonator is a mono- or electroded-layer or a solidly mounted resonator (SMR). The loading effects of Al-electrodes on the resonating frequencies of the piezoelectric ZnO-layer are analyzed. Transmission and reflection properties of Bragg mirrors are investigated along with the bulk radiation in SMR. As a synthesizing example, a coupled resonator filter (CRF) is analyzed using the associated two-port equivalent network and by calculating the power transmission to a 50Omega-load. The stacked crystal filter is naturally included in the model as a special case of CRF. Combining a comprehensive matrix analysis and an instructive network representation and setting the problem with a full vectorial formalism are peculiar features of the presented approach 
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700 1 |a Dubus, Bertrand  |e verfasserin  |4 aut 
700 1 |a Lefebvre, Jean Etienne  |e verfasserin  |4 aut 
700 1 |a Gryba, Tadeusz  |e verfasserin  |4 aut 
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