Anomalous elastic properties of RF-sputtered amorphous TeO2+x thin film for temperature-stable SAW device applications
The anomalous elastic properties of TeO2+x thin films deposited by rf diode sputtering on substrates at room temperature have been studied. The deposited films are amorphous, and IR spectroscopy reveals the formation of Te-O bond. X-ray photoelectron spectroscopy confirms the variation in the stoich...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 3 vom: 14. März, Seite 552-8
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| Auteur principal: |
Dewan, Namrata
(Auteur) |
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| Autres auteurs: |
Sreenivas, Kondepudy,
Gupta, Vinay |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2008
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Evaluation Study
Journal Article
Research Support, Non-U.S. Gov't
Membranes, Artificial
tellurium dioxide
397E9RKE83
Tellurium
NQA0O090ZJ |
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