Thin-film induced effects on the stability of SAW devices
Measurements show an upward shift on the order of 50 ppm in the resonant frequency of a surface acoustic wave (SAW) resonator, as taken before and after the device is hermetically sealed in vacuum following a certain glass-frit sealing process. The authors analyze some of the thin-film phenomena tha...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 36(1989), 2 vom: 15., Seite 231-41 |
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| Format: | Aufsatz |
| Sprache: | English |
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1989
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |