DC bias-dependent shift of the resonance frequencies in BST thin film membranes
Direct current (DC) bias-dependent acoustic resonance phenomena have been observed in micromachined tunable thin film capacitors based on Ba(0.3)Sr(0.7)TiO3 (BST) thin films. The antiresonance frequency is only weakly DC bias dependent, and the resonance frequency exhibits a much stronger dependence...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 12 vom: 30. Dez., Seite 2487-92
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| 1. Verfasser: |
Noeth, Andreas
(VerfasserIn) |
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| Weitere Verfasser: |
Yamada, Tomoaki,
Sherman, Vladimir O,
Muralt, Paul,
Tagantsev, Alexander K,
Setter, Nava |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Membranes, Artificial |
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