Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications
Preparation of (001)-oriented Pb(Zr,Ti)O(3) (PZT) thin films and their applications to a sensor and actuators were investigated. These thin films, which have a composition close to the morphotropic phase boundary, were epitaxially grown on (100)MgO single-crystal substrates by RF magnetron sputterin...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 12 vom: 30. Dez., Seite 2431
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| 1. Verfasser: |
Fujii, Eiji
(VerfasserIn) |
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| Weitere Verfasser: |
Takayama, Ryoichi,
Nomura, Kouji,
Murata, Akiko,
Hirasawa, Taku,
Tomozawa, Atsushi,
Fujii, Satoru,
Kamada, Takeshi,
Torii, Hideo |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Evaluation Study
Journal Article
Membranes, Artificial
lead titanate zirconate
12626-81-2
Lead
2P299V784P
Zirconium
C6V6S92N3C
Titanium
D1JT611TNE |
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