High frequency piezoelectric MEMS ultrasound transducers

High-frequency ultrasound array transducers using piezoelectric thin films on larger structures are being developed for high-resolution imaging systems. The increase in resolution is achieved by a simultaneous increase in operating frequency (30 MHz to about 1 GHz) and close coupling of the electron...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 12 vom: 30. Dez., Seite 2422-30
1. Verfasser: Mina, Ioanna G (VerfasserIn)
Weitere Verfasser: Kim, Hyunsoo, Kim, Insoo, Park, Sung Kyu, Choi, Kyusun, Jackson, Thomas N, Tutwiler, Richard L, Trolier-McKinstry, Susan
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't