Brillouin scattering by surface acoustic modes for elastic characterization of ZnO films
Brillouin scattering from surface phonons was used for determining the dispersion curves of guided acoustic modes propagating along piezoelectric ZnO films. Measurements were performed on films of different thicknesses in the range between 20 and 320 nm, deposited by RF magnetron sputtering on Si an...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 38(1991), 1 vom: 28., Seite 56-61 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1991
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |