Precision frequency trimming of SAW and STW resonators using Xe(+) heavy ion bombardment
A method for precision frequency trimming of surface acoustic wave (SAW) and surface transverse wave (STW) based resonant devices using a Xe(+) heavy ion bombardment technique is described. The devices are downtrimmed in frequency in an in-situ monitoring process by means of a Kaufmann type ion sour...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 41(1994), 5 vom: 15., Seite 694-8 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1994
|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |