Crosstalk reduction with a micromachined diaphragm structure for integrated ultrasound transducer arrays
Crosstalk reduction in a polyvinylidene fluoride (PVDF) integrated ultrasound transducer array with a micromachined diaphragm structure is reported. Three sets of linear arrays with nine 1 mmx1 mm elements on dielectric diaphragms have been made. They were fabricated with (1) a solid substrate, (2)...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 39(1992), 1 vom: 15., Seite 48-53 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1992
|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |