Theoretical investigation of the SAW properties of ferroelectric film composite structures

The characteristics of surface acoustic waves (SAW) propagating on a three-layered structure consisting of a perovskite-type ferroelectric film, a buffer layer and a semiconductor substrate have been studied theoretically. Large coupling coefficients (K(2)) can be obtained when the interdigital tran...

Description complète

Détails bibliographiques

Publié dans:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 45(1998), 2 vom: 15., Seite 305-16
Auteur principal:	Shih, W C (Auteur)
Autres auteurs:	Wu, M S
Format:	Article en ligne
Langue:	English
Publié:	1998
Accès à la collection:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:	Journal Article