Analysis of temperature compensation in a plate thickness mode bulk acoustic wave resonator
We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, wi...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 54(2007), 9 vom: 20. Sept., Seite 1826-33 |
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| Weitere Verfasser: | , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |