|
|
|
|
| LEADER |
01000naa a22002652 4500 |
| 001 |
NLM174377401 |
| 003 |
DE-627 |
| 005 |
20231223135804.0 |
| 007 |
tu |
| 008 |
231223s2007 xx ||||| 00| ||eng c |
| 028 |
5 |
2 |
|a pubmed24n0581.xml
|
| 035 |
|
|
|a (DE-627)NLM174377401
|
| 035 |
|
|
|a (NLM)17935359
|
| 040 |
|
|
|a DE-627
|b ger
|c DE-627
|e rakwb
|
| 041 |
|
|
|a eng
|
| 100 |
1 |
|
|a Tagawa, Masahito
|e verfasserin
|4 aut
|
| 245 |
1 |
0 |
|a Atomic beam-induced fluorination of polyimide and its application to site-selective Cu metallization
|
| 264 |
|
1 |
|c 2007
|
| 336 |
|
|
|a Text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
|
| 338 |
|
|
|a Band
|b nc
|2 rdacarrier
|
| 500 |
|
|
|a Date Completed 15.01.2008
|
| 500 |
|
|
|a Date Revised 30.10.2007
|
| 500 |
|
|
|a published: Print-Electronic
|
| 500 |
|
|
|a Citation Status PubMed-not-MEDLINE
|
| 520 |
|
|
|a Metallization methods of polyimide by hyperthermal atomic oxygen and atomic fluorine beams were developed. An atomic fluorine beam with a translational energy of 6.2 eV modified the wettability of polyimide surfaces to provide an advancing water contact angle of 132 degrees. It was confirmed that in-air storage for 2 months did not alter the hydrophobic property created by the atomic fluorine beam. This stable beam-induced surface fluorination technique was then applied to site-selective electroless Cu plating on polyimide. It was demonstrated that changing the exposure sequence could create both positive- and negative-type plating processes
|
| 650 |
|
4 |
|a Journal Article
|
| 700 |
1 |
|
|a Maeda, Ken-ichi
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Kajita, Tadashi
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Yokota, Kumiko
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Akamatsu, Kensuke
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Nawafune, Hidemi
|e verfasserin
|4 aut
|
| 773 |
0 |
8 |
|i Enthalten in
|t Langmuir : the ACS journal of surfaces and colloids
|d 1992
|g 23(2007), 23 vom: 06. Nov., Seite 11351-4
|w (DE-627)NLM098181009
|x 1520-5827
|7 nnns
|
| 773 |
1 |
8 |
|g volume:23
|g year:2007
|g number:23
|g day:06
|g month:11
|g pages:11351-4
|
| 912 |
|
|
|a GBV_USEFLAG_A
|
| 912 |
|
|
|a SYSFLAG_A
|
| 912 |
|
|
|a GBV_NLM
|
| 912 |
|
|
|a GBV_ILN_22
|
| 912 |
|
|
|a GBV_ILN_350
|
| 912 |
|
|
|a GBV_ILN_721
|
| 951 |
|
|
|a AR
|
| 952 |
|
|
|d 23
|j 2007
|e 23
|b 06
|c 11
|h 11351-4
|