Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors
In this paper, the perturbation method is used to study the velocity shift of surface acoustic waves (SAW) caused by surface pressure and temperature variations of piezoelectric substrates. Effects of pressures and temperatures on elastic, piezoelectric, and dielectric constants of piezoelectric sub...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 6 vom: 09. Juni, Seite 1207-16 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2007
|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't Oxides lithium tantalate oxide Niobium 05175J654G lithium niobate 12031-63-9 Tantalum 6424HBN274 mehr... |