Two-dimensional analysis of spurious modes in aluminum nitride film resonators

Two-dimensional analysis of spurious modes in aluminum nitride film resonators

In this paper, a hybrid method, which combines the traditional concept of guided waves and the finite element method (FEM), is proposed to analyze the spurious modes of aluminum nitride (AIN) film with electrodes. First, the guided wave modes in the plated area are obtained by 1-D FEM. Second, a mod...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 6 vom: 09. Juni, Seite 1171-6
1. Verfasser: Gong, Xun (VerfasserIn)
Weitere Verfasser: Han, Min, Shang, Xiaoli, Xiong, Jun, Duan, Jie, Sekimoto, Hitoshi
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't Aluminum Compounds Membranes, Artificial aluminum nitride 7K47D7P3M0