Control of the microdomain orientation in block copolymer thin films with homopolymers for lithographic application

Block copolymer lithography is a promising method for fabricating periodical nanopatterns of less than 20 nm by self-assembly and can be applicable for fabricating patterned magnetic media with a recording density over 1 Tb/in.2. We found a simple technique to control the orientation of cylindrical...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1991. - 23(2007), 11 vom: 22. Mai, Seite 6404-10
1. Verfasser: Kitano, Hirofumi (VerfasserIn)
Weitere Verfasser: Akasaka, Satoshi, Inoue, Tomohiro, Chen, Feng, Takenaka, Mikihito, Hasegawa, Hirokazu, Yoshida, Hiroshi, Nagano, Hideki
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article