High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon

High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon

The need for high-frequency, wide-band filters has instigated many developments based on combining thin piezoelectric films and high acoustic velocity materials (sapphire, diamond-like carbon, silicon, etc.) to ease the manufacture of devices operating above 2 GHz. In the present work, a technologic...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 54(2007), 4 vom: 17. Apr., Seite 870-6
1. Verfasser: Pastureaud, Thomas (VerfasserIn)
Weitere Verfasser: Solal, Marc, Biasse, Béatrice, Aspar, Bernard, Briot, Jean-Bernard, Daniau, William, Steichen, William, Lardat, Raphaël, Laude, Vincent, Laëns, Alain, Friedt, Jean-Michel, Ballandras, Sylvain
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't Membranes, Artificial Oxides Niobium 05175J654G lithium niobate 12031-63-9 Silicon Z4152N8IUI