Vapor-phase synthesis of mesoporous SiO2-P2O5 thin films

Mesoporous SiO2-P2O5 films were synthesized from the vapor phase onto a silicon substrate. First, a precursor solution of cetyltrimethylammonium bromide (C16TAB), H3PO4, ethanol, and water was deposited on a silicon substrate by a spin-coating method. Then, the C16TAB-H3PO4 composite film was treate...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 23(2007), 9 vom: 24. Apr., Seite 4746-8
1. Verfasser: Nishiyama, Norikazu (VerfasserIn)
Weitere Verfasser: Kaihara, Junji, Nishiyama, Yuko, Egashira, Yasuyuki, Ueyama, Korekazu
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Membranes, Artificial Phosphorus Compounds phosphorus pentoxide 51SWB7223J Silicon Dioxide 7631-86-9 Silicon Z4152N8IUI
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520 |a Mesoporous SiO2-P2O5 films were synthesized from the vapor phase onto a silicon substrate. First, a precursor solution of cetyltrimethylammonium bromide (C16TAB), H3PO4, ethanol, and water was deposited on a silicon substrate by a spin-coating method. Then, the C16TAB-H3PO4 composite film was treated with tetraethoxysilane (TEOS) vapor at 90-180 degrees C for 2.5 h. The H3PO4-C16TAB composite formed a hexagonal structure on the silicon substrate before vapor treatment. The TEOS molecules penetrated into the film without a phase transition. The periodic mesostructure of the SiO2-P2O5 films was retained after calcination. The calcined films showed a high proton conductivity of about 0.55 S/cm at room temperature. The molar ratio of P/Si in the SiO2-P2O5 film was as high as 0.43, a level that was not attained by a premixing sol-gel method. The high phosphate group content and the ordered periodic mesostructure contributed to the high proton conductivity 
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700 1 |a Kaihara, Junji  |e verfasserin  |4 aut 
700 1 |a Nishiyama, Yuko  |e verfasserin  |4 aut 
700 1 |a Egashira, Yasuyuki  |e verfasserin  |4 aut 
700 1 |a Ueyama, Korekazu  |e verfasserin  |4 aut 
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