Performance and characterization of new micromachined high-frequency linear arrays

Performance and characterization of new micromachined high-frequency linear arrays

A new approach for fabricating high frequency (> 20 MHz) linear array transducers, based on laser micromachining, has been developed. A 30 MHz, 64-element, 74-microm pitch, linear array design is presented. The performance of the device is demonstrated by comparing electrical and acoustic measure...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 53(2006), 10 vom: 25. Okt., Seite 1719-29
1. Verfasser: Lukacs, Marc (VerfasserIn)
Weitere Verfasser: Yin, Jianhua, Pang, Guofeng, Garcia, Richard C, Cherin, Emmanuel, Williams, Ross, Mehi, Jim, Foster, F Stuart
Format: Aufsatz
Sprache:English
Veröffentlicht: 2006
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't