Modeling of ultrasonic wave propagation in integrated piezoelectric structures under residual stress
The objective of this study is to understand the role of residual stress in piezoelectric layers in order to predict the performance of integrated structures. This is of particular importance in thick or thin film technology. Considering a bulk piezoelectric material, the Christoffel equation for a...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 53(2006), 4 vom: 20. Apr., Seite 685-96 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2006
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |