Influence of material parameters on acoustic wave propagation modes in ZnO/Si bi-layered structures
The influences of material properties on acoustic wave propagation modes in ZnO/Si bi-layered structures are studied. The transfer matrix method is used to calculate dispersion relations, wave field distributions, and electromechanical coupling coefficients of acoustic wave propagation modes in ZnO/...
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 52(2005), 12 vom: 23. Dez., Seite 2361-9 |
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1. Verfasser: | |
Weitere Verfasser: | , , , |
Format: | Aufsatz |
Sprache: | English |
Veröffentlicht: |
2005
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
Schlagworte: | Evaluation Study Journal Article Research Support, Non-U.S. Gov't Zinc Oxide SOI2LOH54Z Silicon Z4152N8IUI |