Characteristics of (1010) and (1120) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

Characteristics of (1010) and (1120) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflectio...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 52(2005), 11 vom: 01. Nov., Seite 2140-5
1. Verfasser: Yanagitani, Takahiko (VerfasserIn)
Weitere Verfasser: Nohara, Takuya, Matsukawa, Mami, Watanabe, Yoshiaki, Otani, Takahiko
Format: Aufsatz
Sprache:English
Veröffentlicht: 2005
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Membranes, Artificial Zinc Oxide SOI2LOH54Z