Analysis of SAW properties in ZnO/AlxGa1-xN/c-Al2O3 structures

Analysis of SAW properties in ZnO/AlxGa1-xN/c-Al2O3 structures

Piezoelectric thin films on high acoustic velocity nonpiezoelectric substrates, such as ZnO, AlN, or GaN deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films are deposited on AlxGa1-xN/c-Al2O3 (0 < or =...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 52(2005), 7 vom: 07. Juli, Seite 1161-9
1. Verfasser: Chen, Ying (VerfasserIn)
Weitere Verfasser: Emanetoglu, Nuri William, Saraf, Gaurav, Wu, Pan, Lu, Yicheng, Parekh, Aniruddh, Merai, Vinod, Udovich, Eric, Lu, Dong, Lee, Dong S, Armour, Eric A, Pophristic, Milan
Format: Aufsatz
Sprache:English
Veröffentlicht: 2005
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article