Electrode effects on frequency spectra and electromechanical coupling factors of HBAR
In this paper, effects of electrodes on the spectra of high-overtone bulk acoustic resonator are analyzed phenomenologically by numerical simulations. Acoustic impedance ratio of the substrate to piezo-film, Zsb/Z0, and acoustic impedance ratio of the electrode to piezo-film, Ze/Z0, are taken as the...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 52(2005), 6 vom: 07. Juni, Seite 1020-5 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2005
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |