Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators
In a solidly mounted piezoelectric thin film resonator (SMR), acoustic waves propagate not only in the thickness direction but also in the lateral direction. In this study, we analyzed the acoustic wave in the SMR-type piezoelectric thin film resonator and derived the dispersion relation between the...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 52(2005), 4 vom: 30. Apr., Seite 604-9 |
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| Weitere Verfasser: | , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2005
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |