Preparation of submicron-structured alkylsiloxane monolayers using prepatterned silicon substrates by laser direct writing
A new constructive method for the preparation of laterally structured alkylsiloxane monolayers is demonstrated. Laser direct writing has been used to create oxide patterns on H-terminated Si(100) samples under ambient conditions. Depending on the laser power and the writing speed, oxide structures w...
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 20(2004), 9 vom: 27. Apr., Seite 3525-7 |
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1. Verfasser: | |
Weitere Verfasser: | , , |
Format: | Aufsatz |
Sprache: | English |
Veröffentlicht: |
2004
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
Schlagworte: | Letter |