High-resolution X-ray topographic images of dislocations in a silicon crystal recorded using an X-ray zooming tube

A Be-window-type X-ray zooming tube is an X-ray digital imaging system whose magnification factor of X-ray images can be easily varied from 10 to 200, and whose spatial resolution is less than 0.5 micro m. This zooming tube was used as an imaging detector in double-crystal X-ray topography to obtain...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 5(1998), Pt 3 vom: 01. Mai, Seite 1079-81
1. Verfasser: Kimura, S (VerfasserIn)
Weitere Verfasser: Matsumura, T, Kinoshita, K, Hirano, K, Kihara, H
Format: Aufsatz
Sprache:English
Veröffentlicht: 1998
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article